<p>A change in mass of a microbridge in a mass sensor can be sensed by applying a time-varying amplitude modulated electrostatic force to excite the microbridge into resonance at the frequency of amplitude modulation. An optical energy is then transmitted at a wavelength close to a resonant wavelength of a Fabry-Perot microcavity, which is formed by etching a movable reflective mirror into a region of the microbridge and by etching a fixed reflective mirror in a region spaced apart from the microbridge. The two mirrors are interconnected by an optical waveguide. The movable mirror and fixed mirror reflect the optical energy to a receiver, and a change in the Fabry-Perot microcavity' s reflectivity is interferometrically determined. The change in reflectivity indicates a change in the microbridge' s resonant frequency due to increased mass of the microbridge resulting from sorption of a target chemical by a layer of chemoselective material deposited on the microbridge.</p>
申请公布号
WO2010111229(A1)
申请公布日期
2010.09.30
申请号
WO2010US28248
申请日期
2010.03.23
申请人
THE GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE NAVY;PRUESSNER, MARCEL, W.;STIEVATER, TODD, H.;RABINOVICH, WILLIAM, S.
发明人
PRUESSNER, MARCEL, W.;STIEVATER, TODD, H.;RABINOVICH, WILLIAM, S.