| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a calibration block capable of suppressing the generation of an eddy current and securing the advanced smoothness of a reference reflecting surface, wherein the calibration block is provided on a stage so as to calibrate a height measuring instrument for measuring the height of a sample by allowing a light beam to enter and reflect on a surface of the sample mounted on the stage, and has the reference reflecting surface reflecting the light beam from the height measuring instrument on the upper surface thereof. <P>SOLUTION: A block body 102 of the calibration block is formed of a non-conductive material. On the upper surface of the block body 102, a metal coat with a coating thickness of 10-100 μm is laminated, and the surface of the coat 103 is finished into a reference reflecting surface 101 by machining. <P>COPYRIGHT: (C)2010,JPO&INPIT |
