| 摘要 |
<P>PROBLEM TO BE SOLVED: To precisely position a substrate in a θ direction by precisely detecting the inclination of chucks in the θ direction using a plurality of laser displacement gauges. <P>SOLUTION: A moving stage which moves while mounting chucks 10a, 10b includes a first stage 14 configured to move in an X direction (or in a Y direction), a second stage 16 configured to move in the Y direction (or in the X direction) while mounted on the first stage, and a third stage 17 configured to rotate in the θ direction while mounted on the second stage. The second stage 16 is provided with a plurality of laser displacement gauges 43, which move in the XY directions together with the chucks 10a, 10b to measure displacement of the chucks 10a, 10b at a plurality of places by the plurality of laser displacement gauges 43. The θ-directional direction of the chucks 10a, 10b is detected from measurement results and based upon the detection result, the chucks 10a, 10b are rotated in the θ direction by the third stage 17 to position the substrate 1 in the θ direction. <P>COPYRIGHT: (C)2010,JPO&INPIT |
