| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a Lamb-wave resonator for suppressing vertical vibration leakage in a Lamb-wave transmission direction. <P>SOLUTION: In this Lamb-wave resonator 1, an IDT electrode 20 including bus bar electrodes 21d, 22d for connecting one-side ends of electrode digits 21a-21c, 22a, 22b and formed by inserting tips of the plurality of electrode digits into one another, and a pair of reflectors 25, 26 are provided on one principal surface of a crystal substrate 10; when it is assumed that the wavelength of the Lamb waves and the thickness of the crystal substrate are λ and t, respectively, 0<t≤3 is satisfied; and when a line width ratio of the electrode digits in the intersection region of the electrode digits, a normalized electrode film thickness normalized by the wavelength λ, a line width ratio of the electrode digits of a gap, and a normalized electrode film thickness normalized by the wavelength λ are η_IDT, H_IDT/λ, η_g and H_g/λ, respectively, the relationship between a frequency variation ΔF_IDT/F in the intersection region based on the frequency F when η_IDT=η_g=0 and a frequency variation ΔF_g/F in the gap satisfies ΔF_IDT/F<ΔF_g/F. <P>COPYRIGHT: (C)2010,JPO&INPIT |
