| 摘要 |
PROBLEM TO BE SOLVED: To achieve a pressure type flow control device, measuring fluid pressure and a fluid temperature of the same point in a fluid at the same time and controlling an orifice passing flow with high accuracy. SOLUTION: In the pressure type flow control device, a pressure sensor and a temperature sensor are formed as one pressure-temperature sensor 10 in which a constant current power supply is connected between input terminals of a bridge circuit taking four resistors formed on pressure receiving surfaces as four sides to detect a fluid pressure by a voltage change between output terminals thereof, and a fluid temperature is detected by a voltage change between the input terminals. The pressure type flow control device includes: a gas temperature correction means for making correction corresponding to the fluid temperature T and converting it to a fluid pressure P<SB>1</SB>, and making temperature correction with a proportional constant K of a flow arithmetic expression corresponding to the fluid temperature T from the temperature converting means; and a comparator circuit for taking a difference between the correction operation flow Q<SB>C</SB>and a preset flow Q<SB>S</SB>as a control signal and outputting the same to a control valve. COPYRIGHT: (C)2010,JPO&INPIT
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