| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for measuring optical characteristics of an optical component such as an optical pickup and a DSC with high accuracy, by detecting and adjusting its position with respect to an optical axis with high accuracy. SOLUTION: The optical characteristics of the optical component to be inspected can be evaluated at high speed by simultaneously detecting two interference regions 20 and 21 generated by a diffraction grating 16 and having different phases, and calculating initial phases in the interference regions from one interference image by using an intensity radio and a phase difference at the same coordinate point in the interference regions 20 and 21. COPYRIGHT: (C)2010,JPO&INPIT
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