| 摘要 |
PROBLEM TO BE SOLVED: To provide a marking device and a marking method, capable of preventing variations in a marking size. SOLUTION: The marking device includes: an ink jar 10 holding ink 12; a nozzle 14 connected to the ink jar 10 and having an inner diameter narrower than that of the ink jar 10; a core 16 pressing out the ink 12 from the ink jar 10 through the nozzle 14 so that the ink is transferred on a semiconductor wafer 18; a driving solenoid 20 driving the core 16; a control section 22 controlling the driving solenoid 20; and an optical detector 26 optically detecting the position of the core 16. The control section 22 performs a marking operation in which the core 16 is driven by the driving solenoid 20 so that the ink 12 is transferred on the semiconductor wafer 18. When a position of the core 16 detected by the optical detector 26 does not reach a predetermined position in marking, the control section 22 performs the marking operation again to the same position of the semiconductor wafer 18. COPYRIGHT: (C)2010,JPO&INPIT |
