发明名称 POST-RELEASE ADJUSTMENT OF INTERFEROMETRIC MODULATOR REFLECTIVITY
摘要 In various embodiments, devices, methods, and systems for adjusting the reflectivity spectrum of a microelectromechanical systems (MEMS) device are described herein. The method comprises depositing a reflectivity modifying layer with the optical cavity of an interferometric modulator, where the reflectivity modifying layer shifts or trims the shape of the interferometric modulator's wavelength reflectivity spectrum relative to the absence of the reflectivity modifying layer.
申请公布号 US2010245977(A1) 申请公布日期 2010.09.30
申请号 US20090413452 申请日期 2009.03.27
申请人 QUALCOMM MEMS TECHNOLOGIES, INC. 发明人 BITA ION;SAMPSELL JEFFREY B.
分类号 G02B26/00;B05D5/06 主分类号 G02B26/00
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