| 摘要 |
A laminating apparatus including a decompression chamber, a heater table provided in the decompression chamber, and a pressing member provided above the heater table in the decompression chamber. The pressing member includes an elastic sheet facing the heater table, and a supporting frame to support the elastic sheet by partitioning and to form expansion chambers for partitions, each of which makes the elastic sheet expand to the heater table side by a pressure of a fed gas.
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