| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric-pressure plasma generator for forming a lengthy discharging channel and generating a lengthy plasma for irradiation. <P>SOLUTION: An argon flow from a jet nozzle 211 is processed to plasma by means of a high-frequency power in between electrodes 41, 42, and blown out inside a cylindrical member 15 from a left end to a right direction as a preliminary plasma. In the blowing nozzle 221, the argon flow is processed to the plasma by means of the high-frequency power in between the electrodes 43, 44, and blown out inside the cylindrical member 15 from the right end to the left direction as the preliminary plasma. When the high-frequency power is applied in between the electrodes 41, 43, a discharge occurs in between two flows of argon plasma burst into from both ends of a discharging region 150, thereby causing discharge in the whole of the discharging region 150. When a mixture of argon and oxygen is supplied through an inlet port 13, an oxygen plasma P150 is generated and irradiated downward from 170 pieces of second holes 152 formed in the lower portion of the cylindrical member 15. More specifically, the lengthy oxygen plasma P150 as long as 50 cm is generated for irradiation. <P>COPYRIGHT: (C)2010,JPO&INPIT |
