METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, LIQUID INJECTION HEAD AND LIQUID INJECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide: a piezoelectric actuator including a thin film piezoelectric element; a liquid injection head; and a liquid injection apparatus.

SOLUTION: A method of manufacturing a piezoelectric element includes: a step of preparing a first sheet 50 including a first organic film 11, a first ultraviolet curing resin film 12, a first ceramic green sheet 21, and a first electrode pattern 30 formed on the first ceramic green sheet 21; a step of preparing a base material sheet including a second ceramic green sheet 21 formed on a support; a step of bonding the first ceramic green sheet 21 and the first electrode pattern 30 with the second ceramic green sheet 21; a step of emitting ultraviolet rays on the first ultraviolet curing resin film 12 to cure the first ultraviolet curing resin film 12; and a step of separating the first ultraviolet curing resin film 12 having been cured and the first organic film 11 from the first ceramic green sheet 21.

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