| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small composite sensor that exhibits the characteristics of each sensor element and suppresses long-term characteristic variation. <P>SOLUTION: A package 30 includes a space 90 of high pressure and a space 80 of low pressure. An acceleration sensor element 40 is disposed in space 90 of high pressure, so that a low Q value is acquired. Vibration type angular velocity sensor elements 50 and 60 are disposed in the space 80 of low pressure, so that a high Q value is acquired. The characteristics of the acceleration sensor element 40 and vibration type angular velocity sensor elements 50 and 60 can be sufficiently exhibited. <P>COPYRIGHT: (C)2010,JPO&INPIT |
