| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming method wherein sticking matters generated when an epitaxial film is formed on a substrate are efficiently removed. SOLUTION: While the substrate W is supported by a supporting auxiliary member 20, the epitaxial film is formed on the substrate W. Then the substrate W on which the film is formed is removed from the supporting auxiliary member 20, and the front and rear of the supporting auxiliary member 20 are turned over. Then the front surface of the supporting auxiliary member 20, where the sticking matters 310 is formed at the peripheral part thereof, is turned to the rear surface side, and an unprocessed substrate W is mounted on the front surface side. Then an etching gas is sprayed to the supporting auxiliary member 20 mounted with the unprocessed substrate W from the lower surface side with the sticking matters 310, to remove the sticking matters. Then spraying of the etching gas is stopped to form the epitaxial film on the unprocessed substrate W. COPYRIGHT: (C)2010,JPO&INPIT
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