| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of detecting damage to an optical element that can detect damage to an end surface or the inside of an optical element in a solid-state laser oscillator by using scattered light. SOLUTION: The method of detecting the damage to the optical element that detects the damage to an optional optical element end surface in the solid-state laser oscillator includes a scattered light detection step of detecting scattered light from the end surface of the optical element as an object of damage detection in the solid-state laser oscillator, a signal conversion step of converting the scattered light detected in the scattered light detection step into a signal, a comparison step of comparing the signal converted from the scattered light with a previously set value, and an alarm signal generation step of generating an alarm signal when the signal converted from the scattered light exceeds the set value. COPYRIGHT: (C)2010,JPO&INPIT
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