发明名称 SEMICONDUCTOR TESTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To realize a semiconductor testing apparatus for securing a region other than a connection region of a DUT substrate. SOLUTION: The present invention has improved a semiconductor testing apparatus testing a test object with a test head. This apparatus includes the DUT substrate to be electrically connected to the test object and having a plurality of first contacts on a side thereof, and a connecting portion sliding on the test head and having a plurality of second contacts to be electrically connected to the first contacts of the DUT substrate. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010217055(A) 申请公布日期 2010.09.30
申请号 JP20090065356 申请日期 2009.03.18
申请人 YOKOGAWA ELECTRIC CORP 发明人 NISHIUCHI YOSHITAKE
分类号 G01R31/28 主分类号 G01R31/28
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