摘要 |
PROBLEM TO BE SOLVED: To realize a semiconductor testing apparatus for securing a region other than a connection region of a DUT substrate. SOLUTION: The present invention has improved a semiconductor testing apparatus testing a test object with a test head. This apparatus includes the DUT substrate to be electrically connected to the test object and having a plurality of first contacts on a side thereof, and a connecting portion sliding on the test head and having a plurality of second contacts to be electrically connected to the first contacts of the DUT substrate. COPYRIGHT: (C)2010,JPO&INPIT
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