| 摘要 |
PROBLEM TO BE SOLVED: To provide a correction apparatus for a beam irradiation position with no shifting in a test piece observation position even when a conductor is inserted regarding the correction apparatus for the beam irradiation position in a composite apparatus. SOLUTION: The correction apparatus for the beam irradiation position in an SEM-FIB composite apparatus includes a correction table 21 for storing an image shifting amount for correcting the shifting between the irradiation positions of an electron beam from an SEM lens barrel 2 and an ion beam from an FIB lens barrel 3 when the conductor is inserted to a test piece chamber 1 in the state with voltage applied to a collector electrode 7 turned off and a display means 22 for displaying an SEM image or an FIB apparatus image. In this case, the correction apparatus is configured to read out a correction amount for the image shifting that is stored in the correction table 21 in the state with the prescribed accelerating voltage applied to the SEM lens barrel 2 and the FIB lens barrel 3, superposing the correction amount for the image shifting on an image shifting signal from the SEM lens barrel 2 and an image shifting signal from the FIB lens barrel 3 and displaying a secondary electronic image obtained in this state to the display means 22. COPYRIGHT: (C)2010,JPO&INPIT
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