| 摘要 |
The present invention is drawn to an MMIC capacitor comprising a dielectric material interposed between a metal top plate and a metal bottom plate; and a passivation layer having the composition of the dielectric material and applied to the capacitor components such that thickness of the layer eliminates a corona effect. The invention also includes a method for passivating a layer of SiN material onto a top plate having a thickness sufficient to reduce a corona effect dependent on an applied voltage. |
