发明名称 METHOD FOR MANUFACTURING PROBE UNIT AND APPARATUS FOR MANUFACTURING PROBE UNIT
摘要 PURPOSE: A method and an apparatus for manufacturing a probe unit is provided to obtain the arrangement position of the tip part of a probe to be correspond to the contact pad formation position of an object by arranging the tip part of the probe using a transparent substrate with an alignment mark. CONSTITUTION: A probe is mounted into the slit of a probe block(S100). The plate surface of the probe block is combined with the plate surface of the other probe block to be corresponded to each other(S200). A transparent substrate with an alignment mark is arranged on the tip part of the probe(S300). The tip part of the probe is arranged to the corresponding alignment mark by regulating the position of the tip part of the probe(S400). The probe blocks are fixed to each other(S500).
申请公布号 KR20100105223(A) 申请公布日期 2010.09.29
申请号 KR20090024141 申请日期 2009.03.20
申请人 WILL TECHNOLOGY CO., LTD. 发明人 JEON, BYOUNG IL
分类号 H01L21/66;G01R1/073 主分类号 H01L21/66
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