| 摘要 |
PURPOSE: A surface heat-treatment apparatus by plasma nitridation using sub electrodes is provided to reduce the treatment time by increasing the density of suspended ion and electron. CONSTITUTION: A surface heat-treatment apparatus by plasma nitridation using sub electrodes comprises a pair of sub anode plates(152) and a sub cathode plate(162), and an anode pole(150), a cathode pole(160). The sub anode plate and the sub cathode plate are installed under a base jig(140). The anode pole and the cathode pole are arranged to pass through the base jig, and the sub anode plate and the sub cathode plate and applied with power from a power supply unit. The base jig, the sub anode plate and the sub cathode plate form a group and have a plurality of through holes.
|
