发明名称 |
METHOD FOR MAKING P(VDF-TRFE) COPOLYMER LAYER SENSORS, AND CORRESPONDING SENSOR |
摘要 |
<p>The invention relates to the manufacture of a matrix sensor using a sensitive layer of a ferroelectric P(VDF/TrFE) copolymer, deposited on an integrated circuit. In order to simplify the manufacture and improve the yields, deposited first on the integrated circuit is a first layer of titanium and it is etched in order to form a matrix array of electrodes electrically connected to the integrated circuit; next, a P(VDF/TrFE) copolymer comprising a small proportion of around 1 to 10% of a second polymer that favors the adhesion of the P(VDF/TrFE) copolymer is deposited on the integrated circuit; the polymer is either underneath the P(VDF/TrFE) or blended therewith. The copolymer and its adhesion promoter are etched in a single step, and finally a second conductive layer is deposited and it is etched in order to form a counter electrode for the whole of the matrix array. For use in ultrasonic image sensors.</p> |
申请公布号 |
EP2232597(A1) |
申请公布日期 |
2010.09.29 |
申请号 |
EP20080868594 |
申请日期 |
2008.12.11 |
申请人 |
E2V SEMICONDUCTORS |
发明人 |
FRITSCH, LIONEL;GIBERT, PHILIPPE;VACHER, CLAIRE |
分类号 |
H01L37/02;H01L41/317;H01L41/45 |
主分类号 |
H01L37/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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