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发明名称
METHOD AND APPARATUS FOR ESTIMATING RESISTANCE AND CAPACITANCE OF METAL INTERCONNECTS
摘要
申请公布号
EP2232282(A1)
申请公布日期
2010.09.29
申请号
EP20080859300
申请日期
2008.12.05
申请人
QUALCOMM INCORPORATED
发明人
JAYAPALAN, JAYAKANNAN;BANG, DAVID;DU, YANG
分类号
G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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