| 摘要 |
PURPOSE: An excimer lamp is provided to suppress the deterioration of a discharge container by forming a protection layer to absorb or reflect ultraviolet light on the outer tube of the discharge container. CONSTITUTION: A discharge container(11) includes an outer tube(12) and an inner tube(13) arranged on the same axis and forms the discharge space by sealing xenon gas. One electrode(14) is arranged on the outer surface of the outer tube. Other electrode(15) is arranged on the inner surface of the inner tube. One electrode covers half of the outer surface of the outer tube in a cross section vertical to a tube axis of the excimer lamp. A layer to absorb or reflect ultraviolet light of 150 nm or less is formed on the inner surface of the outer tube.
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