| 摘要 |
<p>It is provided a system (1) for recovering hydrogen from exhausted gas of industrial processes using hydrogen as a "gas carrier", in particular epitaxial process and semiconductor and/or photovoltaic industrial processes. The recovery process essentially consists of the following phases: exhausted gas condensation with chlorosilanes recovery, residual impurities abatement treatment, final purification preferably via a palladium membrane unit.</p> |
