| 摘要 |
<p>PURPOSE: A proximity exposure apparatus, a method for determining the substrate location of the same, and a method for manufacturing a display panel substrate are provided to precisely perform a pattern printing operation by improving the precision of the substrate location. CONSTITUTION: A transporting stage includes a first stage(14), a second stage(16), and a third stage. The first stage is transported to the X-direction. The second stage is transported to the Y-direction. The third stage is rotated at theta direction. The third stage determines a substrate location supported by chucks(10a, 10b). A plurality of laser displacement meters(42, 43) measures the displacements of the chucks at a plurality of positions. Based on the measured result of the laser displacement meters, the slope of the chuck is detected.</p> |
