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发明名称
PLASMA GENERATING APPARATUS AND PLASMA GENERATING METHOD
摘要
申请公布号
EP2001044(A4)
申请公布日期
2010.09.29
申请号
EP20070740295
申请日期
2007.03.29
申请人
MITSUI ENGINEERING AND SHIPBUILDING CO, LTD.
发明人
MORI, YASUNARI
分类号
H01L21/3065;H05H1/46
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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