发明名称 |
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS |
摘要 |
An illumination system for a microlithographic projection exposure apparatus includes a mirror arranged in a multi-mirror array and capable of being tilted via at least one actuator. The illumination system also includes drive electronics, which include a coarse digital-to-analogue converter with a first resolution, and a fine digital-to-analogue converter with a second resolution, and an adder. The second resolution is higher than the first resolution. The adder can add output quantities that are output by the two digital-to-analogue converters to yield an overall quantity that is capable of being applied at least indirectly to the at least one actuator of the mirror. |
申请公布号 |
EP2232334(A1) |
申请公布日期 |
2010.09.29 |
申请号 |
EP20080864764 |
申请日期 |
2008.12.19 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
HORN, JAN;KEMPTER, CHRISTIAN;FALLOT-BURGHARDT, WOLFGANG |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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