| 摘要 |
<p>PURPOSE: Overhead hoist transporting system and method are provided to smoothly transport an overhead shuttle by reducing the stopped time of the overhead shuttle. CONSTITUTION: An overhead hoist transporting system(2) includes a linear motor rail(12) and an overhead transporting shuttle(14). The overhead transporting shuttle is moved on the linear motor rail. The overhead transporting shuttle includes a transporting unit(40). A mobile placing system includes a transporting rail(18) in a vicinity of the ceiling of a clean rom. The mobile placing system includes a transversal transporting unit(26) and a rotating unit(27).</p> |
