INSPECTION APPARATUS, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROCESSING CELL AND INSPECTION METHOD
摘要
<p>For angular resolved spectrometry a radiation beam with an illumination profile having four quadrants is used. The first and third quadrants are illuminated whereas the second and fourth quadrants aren't illuminated. The resulting pupil plane is thus also divided into four quadrants with only the zeroth order diffraction pattern appearing in the first and third quadrants and only the first order diffraction pattern appearing in the second and third quadrants.</p>
申请公布号
SG164325(A1)
申请公布日期
2010.09.29
申请号
SG20100008290
申请日期
2010.02.05
申请人
ASML NETHERLANDS B.V.
发明人
CRAMER, HUGO, AUGUSTINUS, JOSEPH;KIERS, ANTOINE, GASTON, MARIE;PELLEMANS, HENRICUS, PETRUS, MARIA