HEATER BLOCK OF RAPID THERMAL PROCESS APPARATUS,申请号EP20080856783-传众专利搜索

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发明名称	HEATER BLOCK OF RAPID THERMAL PROCESS APPARATUS
摘要
申请公布号	EP2232943(A1)	申请公布日期	2010.09.29
申请号	EP20080856783	申请日期	2008.12.01
申请人	ASIA PACIFIC SYSTEMS INC	发明人	SHIM, JANG WOO;KIM, SEUNG YONG;HER, JUN;HWANG, DAE CHEON
分类号	H05B3/06;F26B19/00;F27B11/00;H01L21/22;H01L21/31;H05B3/40	主分类号	H05B3/06
代理机构		代理人
主权项
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