A METHOD FOR FABRICATING A HIGH PERFORMANCE PIN FOCAL PLANE STRUCTURE USING THREE HANDLE WAFERS

摘要

The present invention concerns, in part, a method for fabricating a silicon PIN detector component wherein three handle wafers are bonded to the wafer at varying points in the fabrication process. The utilization of three handle wafers during fabrication significantly ease handling concerns associated with what would otherwise be a relatively thin and fragile wafer, providing a stable and strong base for supporting those portions of the wafer that will constitute the PIN detector component. In a variant of the present invention, the third handle wafer comprises an optical element transparent in the wavelength of interest.