APPARTUS AND METHOD FOR TREATING SUBSTRATES

摘要

PURPOSE: A substrate processing apparatus and a processing method thereof are provided to prevent nozzle pipes from being twisted. CONSTITUTION: A process chamber provides a space for processing a substrate. A substrate transfer unit is arranged inside the process chamber and transfers the substrate. A chemical distributing unit(130) distributes the chemical in both directions. First and second nozzle pipes(120a,120b) supplies the chemical to the substrate loaded on the substrate transfer unit.