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发明名称
摘要
申请公布号
JP4554407(B2)
申请公布日期
2010.09.29
申请号
JP20050075485
申请日期
2005.03.16
申请人
发明人
分类号
H01L21/205;C23C16/44;C30B25/14
主分类号
H01L21/205
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代理人
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地址
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