发明名称 Recessed shallow trench isolation
摘要 In some embodiments, a memory integrated circuit has different shallow trench isolation structures in the memory circuitry of the memory integrated circuit and the control circuitry of the memory integrated circuit. The isolation dielectric fills the trenches of the shallow trench isolation structures to different degrees. In some embodiments, a memory integrated circuit has memory circuitry with shallow trench isolation structures and intermediate regions. The memory circuitry supports a channel between neighboring nonvolatile memory devices supporting multiple current components with different orientations. In some embodiments, recessed shallow trench isolation structures are formed.
申请公布号 US7804152(B2) 申请公布日期 2010.09.28
申请号 US20090392454 申请日期 2009.02.25
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 YEH CHIH CHIEH;TSAI WEN JER
分类号 H01L21/70 主分类号 H01L21/70
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