发明名称 METHOD OF FORMING A MAGNETIC TUNNEL JUNCTION STRUCTURE.
摘要 <p>In a particular illustrative embodiment, a method of forming a magnetic tunnel junction (MTJ) device is disclosed that includes forming a trench (1514) in a substrate (1400). The method further includes depositing a magnetic tunnel junction (MTJ) structure (1516) within the trench. The MTJ structure includes a bottom electrode (1518), a fixed layer, a tunnel barrier layer, a free layer, and a top electrode (1522). The method also includes planarizing the MTJ structure. In a particular example, the MTJ structure is planarized using a Chemical Mechanical Planarization (CMP) process.</p>
申请公布号 MX2010009471(A) 申请公布日期 2010.09.28
申请号 MX20100009471 申请日期 2009.02.23
申请人 QUALCOMM INCORPORATED. 发明人 XIA LI
分类号 H01L43/12;H01L21/8246 主分类号 H01L43/12
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