发明名称 Film pattern forming method, device, electro-optical apparatus, and electronic appliance
摘要 A method for forming a film pattern by disposing a functional fluid on a substrate, includes: forming a partition wall that includes a first opening that corresponds to a first film pattern and a second opening that corresponds to a second film pattern; and disposing a droplet of the functional fluid into the first opening, so that the functional fluid is disposed into the second opening by a self-flow of the functional fluid; wherein: the first film pattern is linear; the second film pattern is narrower than the first film pattern, and is connected to the first film pattern at a rear edge thereof; and a front edge of the second film pattern has a missing part in which a corner of a rectangular contour is missing.
申请公布号 US7803515(B2) 申请公布日期 2010.09.28
申请号 US20060556384 申请日期 2006.11.03
申请人 SEIKO EPSON CORPORATION 发明人 HIRAI TOSHIMITSU;MORIYA KATSUYUKI
分类号 H01L21/00 主分类号 H01L21/00
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