| 摘要 |
PURPOSE: A variable bandwidth pass active filter and a configuration method thereof are provided to reduce insertion loss by using a ferroelectric thin film material. CONSTITUTION: A variable bandwidth pass active filter comprises a high dielectric capacitor. The high dielectric capacitor comprises a silicon substrate(101), a barium strontium titanate thin film(105), and a titanium dioxide buffer layer(103). The barium strontium titanate thin film is formed on the titanium dioxide buffer layer. The titanium dioxide buffer layer is formed on the silicon substrate. The thickness of the silicon substrate is 500um. The thickness of the titanium dioxide buffer layer is 50nm. The thickness of the barium strontium titanate thin film is 0.1 to 1um. |
