发明名称 |
SEMICONDUCTOR INTERGRATED CIRCUIT DEVICE FORMED BY USING THE PRINTING METHOD AND FABRICATION METHOD THEREOF |
摘要 |
<p>PURPOSE: A semiconductor integrated circuit device and a manufacturing method thereof are provided to form a source/drain region which is formed in both side walls of a nano semiconductor type material. CONSTITUTION: A semiconductor integrated circuit device includes a gate(210), a gate insulating layer(220), a nano semiconductor type material(230), and a source/drain region(250). The gate is formed on a substrate. The gate insulating layer is formed on the gate. The nano semiconductor type material is formed in the partial region on the gate insulating layer. The source/drain region is formed on the side wall of the nano semiconductor type material and is separated with the nano semiconductor type material.</p> |
申请公布号 |
KR20100102946(A) |
申请公布日期 |
2010.09.27 |
申请号 |
KR20090021276 |
申请日期 |
2009.03.12 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JEON, SANG HUN;LEE, MOON SOOK |
分类号 |
H01L29/78 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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