发明名称 COMPUTER GENERATED HOLOGRAM, GENERATION METHOD, AND EXPOSURE APPARATUS
摘要 <p>A computer generated hologram which forms a light intensity distribution on a predetermined plane by giving a phase distribution to a wavefront of incident light, the hologram comprising a plurality of anisotropic cells each including an anisotropic medium configured to change a polarization state of the incident light, and a plurality of isotropic cells each including an isotropic medium configured not to change a polarization state of the incident light, wherein a linearly polarized light component, in a first direction, of the incident light forms a first light intensity distribution on the predetermined plane, and a linearly polarized light component, in a second direction perpendicular to the first direction, of the incident light forms a second light intensity distribution different from the first light intensity distribution on the predetermined plane.</p>
申请公布号 KR20100103634(A) 申请公布日期 2010.09.27
申请号 KR20107016424 申请日期 2008.12.08
申请人 CANON KABUSHIKI KAISHA 发明人 MATSUBARA ISAO
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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