| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas transfer apparatus increasing purging effect in long gas transfer conduit or in a pigtail. <P>SOLUTION: The gas transfer apparatus includes: a surge chamber having a vessel including a gas feed source, a pigtail conduit having a start end and a terminal end suited to gas transfer to a use point, a first end, a body section and a second end, the first end in communication with the start end of the pigtail conduit, the body section of the surge chamber having a cross-section larger than the cross-section of the pigtail conduit, and a second end in communication with the vessel containing the gas feed source; a purge gas feed source for delivery of a purge gas toward the vessel including the gas feed source from the terminal end in the pigtail conduit, whereby used during an alternating cycle of pressurization of the pigtail with the purge gas; and a depressurization source within the pigtail conduit, removing impurity gas held in the pigtail. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
