| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize a gate valve. SOLUTION: The gate valve GV is mounted to a load lock chamber LL and is opened/closed to convey a substrate. The gate valve GV includes: a casing 105 formed with a front opening 105a communicating with the internal space of the load lock chamber LL; a rotating member 110 rotatably built in the casing 104 and having a rotating shaft 110a and a valve element 110b mounted to the rotating shaft; and an expandable seal member 200 mounted to the valve element 110b. When closing the gate valve GV, the rotating shaft 110a is rotated to rotate the valve element 110b to a first position to block the front opening 105a, and then the seal member 200 is expanded. COPYRIGHT: (C)2010,JPO&INPIT
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