| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an easily-miniaturizable acceleration sensor. <P>SOLUTION: An electrode block 8 made of a silicon substrate is bonded onto the under surface of an upper cover 2a. The electrode block 8 includes a frame part 80 bonded to a frame part 3 of a sensor chip 1, and first and second fixed electrodes 81a, 81b, 82a, 82b. The first and second fixed electrodes 81a, 81b, 82a, 82b exposed to the upper surface side of the upper cover 2a through a through-hole 20 are used as electrode parts 83a, 83b, 84a, 84b for taking out a detection voltage. Resultantly, an exclusive space for providing the electrode parts which has been necessary for a conventional example becomes unnecessary, to thereby achieve miniaturization easily. <P>COPYRIGHT: (C)2010,JPO&INPIT |
