METHOD OF FABRICATING SEMICONDUCTOR DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a small semiconductor display device of low power consumption and with high definition/high resolution/high image quality. SOLUTION: The semiconductor display device includes a pixel matrix circuit, a data line driver circuit and scanning line driver circuits, and these components are formed on the same substrate using a polycrystalline TFT. The method of fabricating the device including a process for promoting crystallization by a catalytic element and a process for gettering the catalytic element provides the semiconductor display device with high definition/high resolution/high image quality though it is small in size. COPYRIGHT: (C)2010,JPO&INPIT