| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface treatment method and a surface treatment apparatus of metal wire or metal line, capable of suppressing the generation of VOC to suppress an influence on the environment, improving removing power of attached substance from metal surface, suppressing the oxidation of the metal surface and reducing the cost. Ž<P>SOLUTION: This invention relates to the surface treatment method in which a metal wire or metal line 10 is brought into contact with gas-liquid mixed phase fluid to perform surface treatment, wherein the liquid constituting the gas-liquid mixed phase fluid is like droplet having a diameter of 1-100 μm. The metal wire or metal line 10 is a copper wire or a copper line. The liquid constituting the gas-liquid mixed phase fluid consists essentially of water. An average temperature of the gas-liquid mixed phase fluid falls into the range of 40°C to the boiling point. A molar fraction of oxygen contained in the gas-liquid mixed phase fluid is 1% or less. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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