| 摘要 |
<P>PROBLEM TO BE SOLVED: To convert semiconductor manufacturing device data into expressions following designated data definition, and to provide to a user with the data. <P>SOLUTION: This information processing system is configured to use device data recorded in a database according to data definition which can be updated as necessary, and provided with: a storage part for storing a data definition history obtained by making data definition versions associated with a period in which the data definitions are used; a data definition library; an extraction part for extracting the device data through a user interface; and a conversion part for converting the device data into expressions following the designated data definition. The device data are generated by a semiconductor manufacturing device or obtained by processing the data. The conversion part specifies a data definition version by referring to the data definition history, and specifies the data definitions by referring to the data definition library, and converts the device data into expressions following the designated data definition, and provides the user interface with the data. <P>COPYRIGHT: (C)2010,JPO&INPIT |
