| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method and a laser beam machining apparatus easily adjustable to a workpiece, and capable of rapidly executing the machining. <P>SOLUTION: The laser beam machining method comprises a step of outputting laser beam from a laser beam source, a step of splitting the output laser beam into a plurality of ones, a step of determining the spacing of each laser beam when the split laser beam is applied on a workpiece, and a step of applying the laser beam with the determined spacing at the predetermined position of the workpiece. More specifically, in the step of determining the spacing of each laser beam when the split laser beam is applied on the workpiece, the mirror angle is changed, a prism is moved, a diffraction optical element is turned, the driving frequency of an acoustooptical element is changed, or a beam splitter is moved. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
