| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an easy-to-measure interferometer even when its installation space is limited. Ž<P>SOLUTION: A light beam L1 from a laser light source 2 is introduced into a reference plane 721 and an object under measurement 4 to obtain a reference light beam L4 and a measuring light beam L5 of which the polarization planes are orthogonal to each other. A sensor head 7 for emitting their combined light beam L6 is connected to a body 10 having the laser light source 2 through a flexible polarization reserving fiber 309, thereby allowing the sensor head 7 to be placed at an appropriate position and the displacement of the object under measurement 4 to be measured easily even when the installation space is limited. The sensor head 7 is connected to the body 10 through the polarization reserving fiber 309 which guides light with the polarization plane maintained, thereby allowing the polarization planes of the reference light beam L4 and the measuring light beam L5 to be reserved to be orthogonal to each other when the combined light beam L6 emitted from the sensor head 7 propagates through the polarization reserving fiber 309. The displacement of the object under measurement 4 is therefore measured accurately through the combined light beam L6. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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