| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum gauge for low-temperature apparatus whose vibration-proof property and durability have been improved. Ž<P>SOLUTION: The vacuum gauge for low-temperature apparatus includes a low-temperature heat source 1 arranged inside a vacuum heat-insulating container, a heat receiving plate 2, a first temperature sensor 4 for measuring the temperature of the low-temperature source 1, a second temperature sensor 5 for measuring the temperature of the heat receiving plate 2, and a third temperature sensor 6 for measuring the temperature of a thermal shield plate or partitions 3. On the basis of the separation between the low-temperature source 1 and the light receiving plate 2, the area of facing surfaces of the low-temperature source 1 and the heat receiving plate 2, the specific heat and the mass of the heat receiving plate 2, the quantity of heat entering the heat receiving plate 2 from the thermal shield plate or the partitions 3, equilibrium temperatures of the low-temperature source 1 and the heat receiving plate 2, and the temperature of the thermal shield plate or the partitions 3, the heat transfer coefficient between the low-temperature source 1 and the heat receiving plate 2 is found. On the basis of the relation between the heat transfer coefficient and pressure, an equilibrium temperature of the heat receiving plate 2 is computed, and from the relation between the equilibrium temperature of the heat receiving plate 2 and the pressure, the pressure inside the vacuum heat-insulating container is found on the basis of the temperature of the heat receiving plate 2. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
