| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of enhancing a strength against an impact without lowering detection sensitivity. <P>SOLUTION: The acceleration sensor includes a first electrode 400 and a second electrode 401 which are formed by dividing a first movable electrode 40 in two, a first frame 30 which surrounds the first electrode 400 and the second electrode 401 with a prescribed space left in between, and a pair of first beam parts 5a and 5b which connects each of the electrodes 400 and 401 with the first frame 30 respectively and also supports each of the electrodes 400 and 401 so that it can rock in relation to the first frame 30. The first beam parts 5a and 5b are provided respectively in the vicinity of the opposite corners of the first frame 30 and their shafts agree substantially with the direction intersecting a diagonal line of the first frame 30 perpendicularly, while the opposite ends in the axial direction are formed integrally with the first frame 30. In the substantially central portion in the axial direction of each of the beam parts 5a and 5b, each of the electrodes 400 and 401 is formed integrally the same. <P>COPYRIGHT: (C)2010,JPO&INPIT |
