| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small vibratory gyro of good S/N ratio. <P>SOLUTION: This vibratory gyro includes a ring-shaped vibrating body 11, a leg portion 15 flexibly supporting the ring-shaped vibrating body 11, a plurality of electrodes 13a-13d formed by having a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in the thickness direction, and a fixed potential electrode 16. The plurality of electrodes 13a-13d include driving electrodes 13a for exciting primary vibration of the ring-shaped vibrating body 11 in vibration mode of cosNθ, detection electrodes 13b that are arranged at an angle separated from the driving electrodes 13a by (90/N)° and detect secondary vibration occurring when an angular velocity is provided to the ring-like vibrator 11, and suppression electrodes 13d that are arranged at an angle separated from the driving electrodes 13a by (90/N)° or from the detection electrodes 13b by (180/N)° and suppress the secondary vibration on the basis of a voltage signal from the detection electrodes 13b. The electrodes 13a, 13b and 13d are arranged on the outer periphery and/or inner periphery of the ring-shaped vibrating body 11. <P>COPYRIGHT: (C)2010,JPO&INPIT |
