| 摘要 |
PROBLEM TO BE SOLVED: To surely detect only a rapid variation with time of voltage caused by a contact failure of a probe. SOLUTION: A resistance measuring device includes: a current supply part 5 for supplying measurement current I1 to a measurement target 2 through current supply probes 3a and 3b; a voltage measurement part 6 for measuring voltage (input voltage) V2 input through voltage detection probes 4a and 4b connected with both ends of the measurement target 2; and a processing part 8 for integrating voltage values of the voltage V2 over a predefined integration section and also calculating an average voltage value of the voltage V2 over the integration section based on an integral value obtained by the integration to calculate resistance R of the measurement target 2, based on the average voltage value and a current value of the measurement current I1. The processing part 8 calculates a differential value B of the voltage value of the voltage V2 in the integration section per unit time, also compares it with a predetermined reference value A, and outputs the comparison result. COPYRIGHT: (C)2010,JPO&INPIT |
